GENERAL CHARACTERISTICS ITEM DESCRIPTION | RF SYSTEM OPERATING FREQUENCY 13.56 MHZ,NET POWER OUTPUT 100-500 W,SERVICE POWER 110/220 VAC,50/60 HZ,1 KVA,3-RANGE POWER METER,AUTOMATIC TUNING; 4 PYREX OXIDATION CHAMBERS,4 IN. ID,8.5 IN. L; VACUUM PUMP,330 LPM,1 IN. ID CONNECTING HOSE,GAS-FLOW METER,VACUUM METER |